ࡱ> Root EntryRoot Entry0c̾*FileHeaderoDocInfo]jBodyText @̾@̾ HwpSummaryInformation.UPrvImage  PrvTextDocOptions 0c̾0c̾Scripts 0c̾0c̾JScriptVersion v DefaultJScripts_LinkDocw  !"#$%&'()*+,-./0123456789:;<=>?<\><Ti<ij 0X ନ( Б 0   Qǩ> <\Դ><III-Vq Ti<ij 0X i Б ٳƬ@ ȑ 0 D \. GaAs, InGaP, InGaAs X <\ l1 III-Vq Ti<ij Бɔ ̸X 1 ¬X x XX Б@ DPX 40%tX ନ( 1t X. \ 1, )1 X 1<\ Xֽ @ 9\ Xֽij \ °1D U`  Ǵ 䲑\ Qǩ Ȉ ȩ X. Ȕ MOCVD(Metal-Organic CVD)| tǩ\ Epitaxy 10 0\ i III-Vq Б 0 D \. < 10 D tǩ\ x i ȑ 4ܴ- ȲD \ ( 0 , Б X Dx 1 \| $\. P Ȕ III-Vq Б T 0 \ D \. x III-Vq Ti<ij ̸@ ȑ D 8 tհD \ 1 ~ œ 0 0 D ȩ\  Б  ( D . \ l5D X III-V ɹ t|| XՔ 0  0 (ELO, Epitaxial Lift-Off Process)D X, t@ @ X GaAs 0 Ǭ 0x III-Vq БX ¥X % \ ݹD ଐ \. ȹɹ Ȕ III-Vq Б| ȩ\ 䲑\ Qǩ l  @| \. ܴ`, 0ٳ( X 4xtٳ )̩ ͽɷ  Б 0 , 4 % ȡ t8 ¨ȴ Qǩ0 , BIPV =8 Б 0 , ƴ PV-EES 0ȥ 5i \mx0 0  )D \.> <\Ԑ>< 8 > <Y% (Yլt)><ij><><1994 1996 2002><8YP Y Y Yլ 8YP Y Y  8YP Y Y > GIF89aɻxxxkkk]]]PPPCCC555((( d`LH00`Hذ̘`H0|pdXL@`0H `H0`dHL`H0xp`XH@0d LȰ``HH00dLؘȀ`H0xp`XH@d0L `H0d`LH`H0|pdXL@0`$H`dHL00`HذȘdL0xp`XH@0` HdH0ȳ``HHdL0xp`XH@`0H Ը̰ĠऀؘpȈXxHp@h@d8`8X0xT0pH dxddxd`d`p`|``x`p``x`!, H*\ȰÇ#JHŋ3jȱǏ CIɓ(S\ɲ˗0cʜI͛8sɳϟ@ JѣH*]ʴӧPJJիXjʵׯ`ÊKYv`ZgoU\mҤ__xK_+~jǐ#KLr^f]uپe3Ks]4hC]wtpmVy٤>96̱[sҩyN]o9s!6ǘG'5UYҊgm8[E܌&t, H]w[JIbxP"1ֈA6)$eg(vFj飋 %G+(dm&CByvhC{fUybDg:iaؕ87mIR('Ahgܔn:ޭI&+]E֨FhulFJةq禼gR꧘vX[F^oi(xjz[rK{mD6E` V走jbu֚^tF$о%{꽦"h)"m.RYn.sث$冁jesj;$jXkG{VcjE2Ly]kzCخ9!ɱ]?qJ&i5e#hMa$Ek5~"e: AI$ LeNuT]C-mEer ]A9rE[=$wtr{7 fi|Kߝ.s'c |_|Ҡ&;X7B٥-."h6ɨ6ܳ٦J▀@ErWC?eAtVqCVB2'E#-XJBg[8v $(tGqH!?Ⴑ(>8-hS<<VH,2(`F%{-xjVVXZ\؅^`b8dXfxhjl؆npr8tXvxxzh;`a``a`0x  X d p|ajou2010D 2 10| ”| $ 2:36:28ajou8, 5, 8, 1555 WIN32LEWindows_7@m @@̾@VkAfeIiM-lAJZ==xQ/F ZVJӎӰH1E5UڳȀծ<}%% :h3tpiwRźSection0D ͤ?lWq%]NU${A}H[IHv}eO1y\e^Ǫʋֿl2֤fwE1#޺mFTos}zZeh/aÄS@7JV{(A!Yt*Ï\7(%/xzl9U[xiŏN$ػXӟnƾo=]|>Hv\Yugϝͳꛃ݀FeWurkѩ,8STྼUOyۿkHWP Document Fileu@DO 6C,H,#GB!k0~ 6*7=M*Z:ҙ#?*?ӿT@Y~X+mj3'm[v|:j)%C$Mϼ5#cd߈ @| \. ܴ`, 0ٳ( X 4xtٳ )̩ ͽɷ  Б 0 , 4 % ȡ t8 ¨ȴ Qǩ0 , BIPV =8 Б 0 , ƴ PV-EES 0ȥ 5i \mx0 0  )D \.> <\Ԑ>< 8 > <Y% (Yլt)><ij><><1994 1996 2002><8YP Y Y Yլ 8YP Y Y  8YP Y Y > WQhGM$z-*\is%RHcBUVR5)zдr"($>XY9ޙ=m!Q|-afggwZJk /dz tAy9rhT 9oVMUyMv6aXWplD;0|5 8fr:y}5 3N97E-^K6;VsW[~|3c8YZڑb i3b2OY}5R{'k8,Ds9wN; r>r!NW.5zKjq8|I:ĥps]ܨ6!D9m٦Zq|8|2PޒHӧ =TxMtrLJMԧ ༕/=X󚜤>!&[tG(ǼKN2tP``9s%,˶6.s9e_)Ā7~\_+%/0[Wy6T+Ml?]\lRb9kC*ؙz0&lO}8 yO+c4%;x$6əQDu*L#w"#ޘN/⳨P4@=lښ*~eWTk' Ľ C FE٫k M*"X| qA`جnFStܭLUM2Pث{O]RjP%LMi%Cq$]3idEhJk.bZY^gzq2؋gX6ۜDzfCmH J˨3T+4R [POz7Qp >聃!?MK#*A4O@B6k7?Jzt)eG;/*F߱|JTϑRgrRJ_ULO̤W 5U>U;#';gh ]@ }kմ Swo?=6?`)ս\n._Kr* Uހ4vF' w,#HE(JgC8Fk*$Ҽک{YQŧɕ#"ɎڪV#|z/ozDy8XMFHSs z. )J]#O*qA؎CzGUal#:I uc?eKeDůc,ZǤQ+0*AkۋcAOø QQ7#^x/,}͈BqT޶XnGX>j"Y Ev{Y,7n)]/1){)ϞJM"r2y {G %rs,6+uIVeP72 }[j5!& J- *o_a\PxmCIGjF]I a߂{S|4R|:l+pnЂwjp:t9껪ǜP Niv<͒Da>=$m~ Nt|`M˟??];9]󋞮zP?]E]#CF4fv_ҙ"C%:,`POAVKKQ>LjamV i¨-ZZ.lK -OSЖYt]t#t"#$b2\$H\u? .yeIRp;Ιs|wO.X@ty|x #GيoZ}$L%D\b}lւ$0ɑb0v!bBg<0@UaVz@flX ;&*%b3Oc. ;5F۠61dRDG5:ʞƔKq3r<k fU1 |[]Λ6봴6ɱʫ\<s1|>erE